FEATURES OF THE DG6000CS REACTOR
- 2 INCH LARGE AREA PLASMA FIREBALL
- AUTOMATION PROCESS FOR LESS HUMAN ERROR
- EASY SUBSTRATE LOADING
- LOW MAINTENANCE
- GROWING TRAINING PROGRAM
- HIGH VACUUM ATMOSPHERE FOR HIGH QUALITY DIAMOND GROWING
TECHNICAL SPECIFICATIONS
CHAMBER AND THE SUBSTRATE HOLDER
- Type-Clamshell
- Chamber material - Aluminium
- Substrate - Moly
- Stage material - Copper
- Water cooling for chamber walls and stage
- Visual control - 5 diagnostic CF quartz windows
Microwave system
- MW power supply - 6kW, air cooled
- Mangnetron - 6 kW at 2.45 GHz, water cooled
- 3 stub tuner
- Power Detector
Vacuum system
- Operating pressure 0-200torr
- Stainless steel vacuum fittings
- Control valves, pressure regulators
- Vacuum: 10*-3
- Turbo vacuum pump option available
Gas system
- Stainless steel fittings
- Mass Flow Controllers
- From 4 to 6 gas lines
- H2 1000sccm, Ch4 100sccm, O2 20sccm, N2 3sccm flow range
Cooling system
- The internal cooling circuit
- Monitoring of flow rate and temperature of all cooling lines
Electric system
- Voltage AC 3-phase 400V
- Power consumption up to 10 kW
- The emergency stop button
Temperature device
- Pyrometer range: 300 - 1900 celcius
- Spectrum 1-1.6
Automation
- Industrial PC/ PLC control
- Recipe setup screen
- Remote Monitoring
- Safety interlocks like microwave arcing, power variations,etc
- Customised alarms can be set according to your recipe.
DIAMOND GROWTH POSSIBILITIES
Monocrystalline plates
- Growth rate from 5 to 50 µm/hour depending on the quality of the plates
- Ability to load up to 21 substrates with a size of 7x7 mm
Polycrystalline plates
- Material uniformity over the entire plate area
- Growth rate from 2 to 10 µm/hour depending on the size
